All in situ - one vacuum space - thin film structures growth and investigation tool.

Two complementary methods of formation nanoscale objects:

• Pulsed Laser Deposition (PLD);
• Atomic Layer Deposition (ALD).

Pulsed Laser Deposition

Specifications:

• Solid-state Nd: YAG laser operating at 1, 2, 3 and 4th harmonics (wavelength 1064, 532,355 and 266 nm);
• High Т heater;
• Gas flow control; 
• High vacuum (10^-10 Torr).

Applications:

• Multiple Component Oxides;
• High Temperature Superconductors;
• Magnetic and Metallic Material Deposition;
• Low Vapor Pressure Materials MEMS.

Atomic Layer Deposition

is used to fabricate ultra­thin and con­formal thin film structures for many semiconductor and thin film device applications and sequential self­limiting surface reactions to achieve control of film growth in the monolayer or sub-monolayer thickness regime. 

Specifications:

• 4 gas lines;
• Up to 500^oC heater;
• SIMS gas control.

Applications:

• Moisture barrier layers;
• Device Encapsulations;
• MEMS.

Secondary lon Mass Spectrometry

Secondary lon Mass Spectrometry (SIMS) is the most sensitive of all the commonly­-employed surface analytical techniques - capable of detecting impurity elements present in а surface layer at <1ppm concentration, and bulk concentrations of impurities of around 1ppb (parts-per­-billion) in favorable cases. This is because of the inherent high sensitivity associated with mass spectrometric-based techniques.

Surface Analysis by TOF-SIMS "Kore The SurfaceSeer":

• TOF-SIMS surface analysis;
• Surface mass spectrometry;
• Insulator analysis;
• Positive and Negative SIMS 1000 M/∆M;
• Mass range >1000m/z;
• Sputter cleaning capability;
• 5 minute time for analysis;
• Compact;
• Expandble.

ln situ Reflection High-Energy ELectron Diffraction ("RIA-RHEED")

• Diffraction studies and growth moni­toring for different applications;
• Electron beam of small spot size and energies up to 10 keV;
• Real-Time Oscillation Measurement and FFT Analysis;
• Lattice Constant Measurement;
• 2D and 3D Charts for Documentation.